Belgium's Imec Secures ASML's Next-Gen High NA EUV Equipment—Fewer Than 10 Worldwide
$400 Million Next-Generation Lithography System to Accelerate Sub-2nm Process Development, Emerges as Key Infrastructure for EU Semiconductor Sovereignty
- •Belgium's semiconductor research institute Imec secures ASML's $400 million High NA EUV lithography equipment—fewer than 10 units exist worldwide
- •Next-generation equipment capable of implementing 8nm circuit patterns to accelerate sub-2nm process development, targeting qualification completion by Q4 2026
- •Core facility for EU Chips Act-supported 2.5 billion euro NanoIC pilot line, expected to play central role in Europe's semiconductor technology sovereignty strategy
Europe's Semiconductor Research Hub Secures Next-Generation Chip Manufacturing Technology
Belgium's semiconductor research hub Imec announced on March 18 that it has secured ASML's next-generation High NA EUV (Extreme Ultraviolet) lithography equipment, the 'TWINSCAN EXE:5200.' This equipment, valued at approximately $400 million (about 560 billion KRW), is a cutting-edge chip manufacturing system with fewer than 10 units currently existing worldwide, capable of implementing circuit patterns as small as 8 nanometers (nm) with a single exposure. Imec took delivery of the equipment from ASML's facility in Veldhoven, Netherlands, earlier this week and has completed installation in the cleanroom at its headquarters in Leuven, Belgium.
Imec CEO Luc Van den hove emphasized that "the introduction of this High NA EUV equipment is essential for strengthening Europe's strategic independence and its position in the global semiconductor value chain." According to Reuters, major ASML customers including Intel and SK hynix plan to begin mass production of next-generation AI logic chips and high-bandwidth memory (HBM) chips using High NA equipment starting in 2027.
Why This Equipment Matters: Gateway to the Sub-2nm Process Era
High NA (High Numerical Aperture) EUV technology is a next-generation lithography technology that significantly improves resolution compared to existing Low NA EUV. 'NA (Numerical Aperture)' is an indicator of a lens's ability to collect light—the higher the value, the finer the circuit patterns that can be implemented. ASML's EXE:5200 achieves an NA of 0.55, providing approximately 1.7 times better resolution than existing Low NA EUV (NA 0.33).
This is considered essential technology for developing sub-2nm processes. With Samsung Electronics and TSMC currently in the 3nm process mass production stage and fierce competition in 2nm process development, High NA EUV is expected to become a key tool for implementing next-generation processes such as 1.4nm and 1nm. Particularly as demand for AI semiconductors surges and requirements for high-performance, low-power chips grow, the strategic value of High NA EUV is increasing further.
Imec's acquisition of this equipment goes beyond simply expanding research infrastructure—it is part of Europe's strategy to narrow the semiconductor technology gap with the United States and Asia and build an independent chip manufacturing ecosystem. Through the 'EU Chips Act,' the EU has set a goal to expand its global semiconductor market share from the current 10% to 20% by 2030, and Imec's next-generation chip development infrastructure is expected to be a key pillar in achieving this goal.
Imec's Role: A Joint Research Platform for Chip Manufacturers
Imec operates a unique business model that serves as a bridge between semiconductor equipment manufacturers and chip makers. Considering that individual companies find it difficult to purchase cutting-edge equipment worth tens of billions of won independently, Imec enters into bilateral contracts with major equipment vendors such as ASML, Applied Materials, LAM Research, KLA, and Tokyo Electron to secure the latest equipment, which it then shares with multiple companies and researchers.
This allows global chip manufacturers to test and verify next-generation process technologies in Imec's fabrication facility environment. By confirming technical feasibility before investing in actual production lines, they can reduce development risks and shorten time-to-market. Imec has a history of collaborating with ASML since the early development stages of EUV technology, and this High NA EUV equipment introduction is an extension of that relationship.
NanoIC Pilot Line: EU's Semiconductor Sovereignty Project
The High NA EUV equipment is a core facility in Imec's 'NanoIC Pilot Line' project, valued at 2.5 billion euros (approximately 3.7 trillion KRW). This project receives 1.4 billion euros in public funding support under the EU Chips Act and plans to complete full qualification by Q4 2026.
The NanoIC Pilot Line is not merely a research facility but a 'pilot production' line that verifies next-generation processes under conditions close to actual mass production environments. Through this, the EU's strategy is for European fabless companies and foundry operators to secure sub-2nm process technology and establish an independent position in the global semiconductor supply chain.
Currently, advanced semiconductor manufacturing is oligopolized by three companies—TSMC (Taiwan), Samsung Electronics (South Korea), and Intel (United States)—and Europe essentially lacks advanced logic chip manufacturing capabilities. The NanoIC project can be seen as an attempt to resolve this technological dependency and internalize next-generation process technology at least at the pilot level.
Global High NA EUV Competition Landscape
| Item | Low NA EUV | High NA EUV | Change |
|---|---|---|---|
| Numerical Aperture (NA) | 0.33 | 0.55 | +67% |
| Minimum Line Width | 13nm | 8nm | -38% |
| Resolution | Baseline | 1.7x improvement | +70% |
| Equipment Price | ~$150 million | ~$400 million | +167% |
| Worldwide Installations | 200+ units | <10 units | - |
| Major Customers | TSMC, Samsung, Intel, SK hynix | Intel, SK hynix, (TSMC considering) | - |
ASML is producing High NA EUV equipment at a limited rate of 10-20 units per year, with Intel reportedly securing two units as the first customer. SK hynix is considering introducing High NA EUV for HBM4 development, while TSMC maintains a cautious stance. Imec's equipment acquisition is significant in that Europe has secured technology access within this oligopolistic structure centered on a few companies.
[AI Analysis] Semiconductor Technology Sovereignty Competition Expected to Intensify
Imec's acquisition of High NA EUV suggests that global semiconductor technology sovereignty competition has entered a new phase. The United States is supporting the construction of advanced fabs domestically through the CHIPS Act, while China is accelerating development of its own EUV technology. As Europe also pursues technological independence through the EU Chips Act and NanoIC project, multipolarization of the semiconductor supply chain is likely to accelerate.
However, Europe still has many hurdles to overcome before securing actual mass production capabilities. Since Imec's pilot line is primarily for research and development purposes, converting it to commercial mass production would require additional investments of trillions of won and more than 10 years. Additionally, with ASML's High NA EUV production capacity limited, competition for equipment acquisition with existing fab operators such as Intel, TSMC, and Samsung is expected to intensify.
Meanwhile, the possibility that the commercialization timeline for sub-2nm processes could be accelerated due to surging AI semiconductor demand has also been raised. AI chip design companies such as Nvidia, AMD, and Google are demanding higher transistor density and power efficiency, which could become a factor promoting early adoption of High NA EUV technology. If Imec completes full qualification by Q4 2026, it is expected to establish a foundation for European companies to fully join the next-generation AI chip development race around 2027-2028.
댓글 (3)
Belgium 관련 기사 잘 읽었습니다. 유익한 정보네요.
Imec에 대해 더 알고 싶어졌습니다. 후속 기사 부탁드립니다.
그 부분은 저도 궁금했습니다.
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